Material Safety Data Sheet

Current Version: 2.0

Revision Date: Sep 5, 2012

Material Safety Data Sheet
Identity: Hafnium oxide Formula: HfO_{2
SECTION I - GENERAL INFORMATION}
Manufacturer: Stanford Advanced Materials (SAM)
The information below is believed to be accurate and represents the best information available to SAM. However, SAM makes no warranty, expressed or implied with respect to such information and assumes no liability resulting from its use.
_{SECTION II - HAZARDOUS INGREDIENTS/IDENTITY INFORMATION}
Molecular weight: 210.47
_{CAS # OSHA PEL ACGIH TLV %}

12055-23-1 0.5mg (Hf)/m³ 0.5mg(Hf)/m³ 0-100

_{SECTION III – PHYSICAL/CHEMICAL CHARACTERISTICS}
Physical States: Solid
Boiling Point: approximately 5400°C Vapor Pressure (vs. air or mmHg): essentially 0

Melting Point: N/A Specific gravity: 9.68

Evaporation Rate: N/A Flash Point: N/A

Solubility in water: Insoluble

Appearance and odor: White powder or lumps, odorless
_{SECTION IV - FIRE AND EXPLOSION HAZARD DATA:}
Method Used: Non-flammable Explosive Limits: LEL: N/A UEL: N/A

Extinguishing Media: Use suitable extinguishing agent for surrounding material and type of fire
Special Fire Fighting Procedures:

Firefighters must wear full face, self-contained breathing apparatus with full protective clothing to prevent contact with skin and eyes. Fumes from fire are hazardous. Isolate runoff to prevent environmental pollution.

Unusual Fire and Explosion Hazards: None known
SECTION V - REACTIVITY DATA

Stability: Stable

Conditions to Avoid (stability): strong oxidizing agents

Incompatibility: N/A
Hazardous Decomposition or Byproducts: Hafnium compounds

Hazardous Polymerization: Will not occur

Conditions to avoid (hazardous polymerization): N/A
_{SECTION VI - HEALTH HAZARD DATA}
Health Hazards (Acute and Chronic):

Inhalation: May cause irritation to respiratory system

Ingestion: May cause liver damage

Skin: May cause redness, itching, and/or rashes

Eye: May cause redness, itching, swelling, watering and/or burning
Carcinogenicity: NTP? No IARC Monographs? No OSHA Regulated? No
Emergency and First Aid Procedures:

Inhalation: Remove victim to fresh air, keep warm and quiet, and give oxygen if breathing is difficult; seek medical attention

Ingestion: Give 1-2 glasses of milk or water, seek medical attention. Never induce vomiting or give anything by mouth to an unconscious person

Skin: Remove contaminated clothing, brush material off skin, wash affected area with mild soap and

water, and seek medical attention if symptoms persist

Eye: Flush eyes with lukewarm water, lifting upper and lower eyelids for at least 15 minutes and seek medical attention
_{SECTION VII - PRECAUTIONS FOR SAFE HANDLING AND USE}
Steps to be taken in case material is released or spilled:

Wear appropriate respiratory and protective equipment specified in section VIII. Isolate spill area, provide ventilation and extinguish sources of ignition. Vacuum up spill using a high efficiency particulate absolute (HEPA) air filter and place in a closed container for proper disposal. Take care not to raise dust.

Waste disposal method: Dispose of in accordance with state, local, and federal regulations.
Hazard Label Information:

Store in cool, dry area and in tightly sealed container. Wash thoroughly after handling.

_{SECTION VIII - CONTROL MEASURES}
Protective Equipment Summary (Hazard Label Information):

NIOSH approved respirator, impervious rubber gloves, safety glasses, clothes to prevent contact.

Ventilation:
Local Exhaust: To maintain concentration at low exposure levels. Mechanical (General): Recommended.
Work/Hygienic/Maintenance Practices:

Implement engineering and work practice controls to reduce and maintain concentration of exposure at low levels. Use good housekeeping and sanitation practices. Do not use tobacco or food in work area. Wash thoroughly before eating or smoking. Do not blow dust off clothing or skin with compressed air.

Please be advised that N/A can either mean Not Applicable or No Data Has Been Established