Current Version: 2.0
Revision Date: Sep 5, 2012
Material Safety Data Sheet
Identity: Hafnium oxide Formula: HfO
2
SECTION I - GENERAL INFORMATION
Manufacturer: Stanford Advanced Materials (SAM)
The information below is believed to be accurate and represents the best information available to SAM. However, SAM makes no warranty, expressed or implied with respect to such information and assumes no liability resulting from its use.
SECTION II - HAZARDOUS INGREDIENTS/IDENTITY INFORMATION
Molecular weight: 210.47
CAS # OSHA PEL ACGIH TLV %
12055-23-1 0.5mg (Hf)/m3 0.5mg(Hf)/m3 0-100
SECTION III – PHYSICAL/CHEMICAL CHARACTERISTICS
Physical States: Solid
Boiling Point: approximately 5400°C Vapor Pressure (vs. air or mmHg): essentially 0
Melting Point: N/A Specific gravity: 9.68
Evaporation Rate: N/A Flash Point: N/A
Solubility in water: Insoluble
Appearance and odor: White powder or lumps, odorless
SECTION IV - FIRE AND EXPLOSION HAZARD DATA:
Method Used:
Non-flammable Explosive Limits: LEL: N/A UEL: N/A
Extinguishing Media: Use suitable extinguishing agent for surrounding material and type of fire
Special Fire Fighting Procedures:
Firefighters must wear full face, self-contained breathing apparatus with full protective clothing to prevent contact with skin and eyes. Fumes from fire are hazardous. Isolate runoff to prevent environmental pollution.
Unusual Fire and Explosion Hazards: None known
SECTION V - REACTIVITY DATA
Wear appropriate respiratory and protective equipment specified in section VIII. Isolate spill area, provide ventilation and extinguish sources of ignition. Vacuum up spill using a high efficiency particulate absolute (HEPA) air filter and place in a closed container for proper disposal. Take care not to raise dust.
Store in cool, dry area and in tightly sealed container. Wash thoroughly after handling.
Implement engineering and work practice controls to reduce and maintain concentration of exposure at low levels. Use good housekeeping and sanitation practices. Do not use tobacco or food in work area. Wash thoroughly before eating or smoking. Do not blow dust off clothing or skin with compressed air.