Standard Operating Procedure for Chemical Handling and Storage

Standard Operating Procedure for Chemical Handling and Storage 
EHS-00005 R12

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Appendix C 
Table I: (TABLE 1804.2.1) 
Maximum Chemical Quantities Stored in a Single Fabrication Area
Hazard Category 
Solid 
(Lbs. /sq. ft.) 
Liquids 
(Lbs. /sq. ft.) 
Gases 
(Cu ft @ NTP / sq. ft.) 
Physical - Hazard Materials
Combustible Fiber 
Loose 
Baled 
100 cu ft. 
1000 cu ft. 
Not Applicable 
Not Applicable 
Combustible Liquid 
Class II 
Class IIIA 
Class IIIB 
Combination 
– Class 
I, II, IIIA 
Not Applicable 
0.01 
0.02 
Not Limited 
0.04 
Not Applicable 
Cryogenic gas 
Flammable 
Oxidizing 
Not Applicable 
Not Applicable 
Note c 
1.25 
Explosives 
Note b 
Note b 
Note b 
Flammable Gas 
Gaseous 
Liquefied 
Not Applicable 
Not Applicable 
Note c 
Note c 
Flammable Liquid 
Class IA 
Class IB 
Class IC 
Combination Class 
IA, IB, and IC 
Combination Class I, 
II, and IIIA 
Not Applicable 
0.0025 
0.025 
0.025 
0.025 
0.04 
Not Applicable 
Flammable Solid 
0.01 
Not Applicable 
Not Applicable 
Organic Peroxide 
Unclassified 
detonable 
Class I 
Class II 
Class III 
Class IV 
Class V 
Note b 
Note b 
0.025 
0.1 
Not Limited 
Not Limited 
Not Applicable 
Not Applicable 
Oxidizing Gas 
Gaseous 
Liquefied 
Combination of 
Gaseous and 
Liquefied 
Not Applicable 
Not Applicable 
1.25 
1.25 
1.25 

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Standard Operating Procedure for Chemical Handling and Storage 
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Hazard Category 
Solid 
(Lbs. /sq. ft.) 
Liquids 
(Lbs. /sq. ft.) 
Gases 
(Cu ft @ NTP / sq. ft.) 
Oxidizer 
Class 4 
Class 3 
Class 2 
Class 1 
Combination 
Oxidizer Class 1,2,3 
Note b 
0.003 
0.003 
0.003 
0.003 
Note b 
0.03 
0.03 
0.03 
0.03 
Not Applicable 
Pyrophoric 
Note b 
0.00125 
Notes c and d 
Unstable reactive 
Class 4 
Class 3 
Class 2 
Class 1 
Note b 
0.025 
0.1 
Not Limited 
Note b 
0.025 
0.1 
Not Limited 
Note b 
Note b 
Note b 
Not Limited 
Water reactive 
Class 3 
Class 2 
Class 1 
Note b 
0.025 
Not Limited 
0.00125 
0,025 
Not Limited 
Not Applicable 
Health 
– Hazard Materials 
Corrosives 
Not Limited 
Not Limited 
Not Limited 
Highly Toxics 
Not Limited 
Not Limited 
Note c 
Toxics 
Not Limited 
Not Limited 
Note c 
This is Table 1804.2.1 from the Fire Code of New York State, specific to 
semiconductor fabrication facilities in Group H-5. 
NOTES
: 
a.
Hazardous materials within piping shall not be included in the calculated 
quantities. 
b.
Quantity of hazardous materials in a single fabrication area shall not exceed 
exempt amounts in Table 2703.1(1) and 2703.1.1(2) in the Fire Code of New York 
State. 
c.
The aggregate quantity of flammable, pyrophoric, toxic and highly toxic gases 
shall not exceed 9,000 cubic feet at normal temperature and pressure (NTP). 
d.
The aggregate quantity of pyrophoric gases in the building shall not exceed the 
amounts set forth in Tables 2703.1(1) and 2703.8.2 in the Fire Code of New York 
State.

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Standard Operating Procedure for Chemical Handling and Storage 
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Appendix D 
Table II: (TABLE 1805.2.1) 
Maximum Quantities of HPM at a Work Station
e 
 
HPM Classification 
Physical State 
Maximum Quantity 
Flammable, highly toxic, 
pyrophoric and toxic 
combined 
Gas 
3 cylinders 
Flammable 
Liquid
Solid 
15 gallons 
a,b,c 
5 pounds 
b,c 
Corrosive 
Gas 
Liquid 
Solid 
3 cylinders 
25 gallons 
a,b,c
20 pounds 
b,c
Highly toxic 
Liquid 
Solid 
15 gallons 
a,b
5 pounds 
b
Oxidizer 
Gas 
Liquid 
Solid 
3 cylinders 
12 gallons 
a,b,c
20 pounds 
b,c
Pyrophoric 
Liquid 
Solid 
0.5 gallon 
d
See Table 1804.2.1 
Toxic 
Liquid 
Solid 
15 gallons 
a,b,c
5 pounds 
b,c
Unstable reactive 
Class 3 
Liquid 
Solid 
0.5 gallon 
b,c
5 pounds 
b,c
Water reactive 
Class 3 
Liquid 
Solid 
0.5 gallon 
d
See Table 1804.2.1 
Table 1805.2.1 from the Fire Code of New York State, Chapter 18 – Semiconductor 
Fabrication Facilities. 
NOTES
: 
a. DOT shipping containers with a capacity of greater than 5.3 gallons shall not be 
located within a workstation. 
b. Maximum allowable quantities shall be increased 100 percent for use-closed 
systems operations. When Note c also applies, the increase for both notes shall 
be allowed. 
c. Quantities shall be allowed to be increased 100 percent when workstations are 
internally protected with an approved automatic fire-extinguishing or suppression 
system complying with Chapter 9. When note b also applies, the increase for both 
notes shall be allowed. 
d. Allowed only in workstations that are internally protected with an approved 
automatic fire-extinguishing or suppression system complying with Chapter 9. 
e. The quantity limits apply only to materials classified as HPM. 

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Standard Operating Procedure for Chemical Handling and Storage 
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Appendix E 
Table III (A): (TABLE F2703.1.1(1)) 
Maximum Allowable Quantity per Control Area of Hazardous Materials posing a 
“Physical” Hazard 
a,j,m
Hazard Category 
Solid pounds 
(cubic feet) 
Liquids gallons 
(pounds) 
Gas 
(cubic feet) 
Combustible Liquid
c, i
Class II 
Class IIIA 
Class IIIB 
Not Applicable 
120
d,e
330
d,e
13,200
e,f
Not Applicable 
Combustible Fiber 
(100) 
(1000) 
Not Applicable 
Not Applicable 
Cryogenic 
Flammable 
Not Applicable 
45
d
Not Applicable 
Cryogenic 
Oxidizing 
Not Applicable 
45
d
Not Applicable 
Explosives 
Note b 
Note b 
Note b 
Flammable Gas 
Gaseous 
Liquefied 
Not Applicable 
Not Applicable 
30
d,e
1000
d,e 
Not Applicable 
Flammable Liquid
c
Class IA 
Class IB 
Class IC 
Not Applicable 
30
d,e
60
d,e
90
d,e
Not Applicable 
Combination 
Flammable Liquid
(I-A, I-B, I-C) 
Not Applicable 
120
d,e,h
Not Applicable 
Flammable Solid 
125
d,e
Not Applicable 
Not Applicable 
Organic Peroxide 
Unclassified detonable 
Class I 
Class II 
Class III 
Class IV 
Class V 
1
e,g
5
d,e 
50
d,e 
125
d,e 
Not Limited 
Not Limited 
(1)
e,g
(5)
d,e 
(50)
d,e 
(125)
d,e 
Not Limited 
Not Limited 
Not Applicable 
Oxidizing Gas 
Gaseous 
Liquefied 
Not Applicable 
Not Applicable 
15
d,e
1,500
d,e 
Not Applicable 
Oxidizer 
Class 4 
Class 3 
Class 2 
Class 1 
1
e,g
10
d,e 
250
d,e 
4,000
e,f 
(1)
e,g
(10)
d,e 
(250)
d,e 
(4,000)
e,f 
Not Applicable 
Pyrophoric 
4
e,g
(4)
e,g
50
e,g

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Standard Operating Procedure for Chemical Handling and Storage 
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Hazard Category 
Solid pounds 
(cubic feet) 
Liquids gallons 
(pounds) 
Gas 
(cubic feet) 
Unstable reactive 
Class 4 
Class 3 
Class 2 
Class 1 
1
e,g
5
d,e 
50
d,e 
Not Limited 
(1)
e,g
(5)
d,e 
(50)
d,e 
Not Limited 
10
e,g
50
d,e 
250
d,e 
Not Limited 
Water reactive 
Class 3 
Class 2 
Class 1 
5
d,e 
50
d,e 
Not Limited 
(5)
d,e 
(50)
d,e 
Not Limited 
Not Applicable 
NOTES: 
 
a.
For use of control areas, see §F2703.8.2. 
b.
The aggregate quantity in use and storage shall not exceed the quantity listed 
for storage. 
c.
The quantities of alcoholic beverages in retail and wholesale sales occupancies 
shall not be limited providing the liquids are packaged in individual containers 
not exceeding 1.3 gallons.
d.
Maximum allowable quantities shall be increased 100 percent in buildings equipped 
throughout with an approved automatic sprinkler system in accordance with 
§F903.3.1.1. Where Note e also applies, the increase for both notes shall be 
applied accumulatively. 
e.
Maximum allowable quantities shall be increased 100 percent when stored in 
approved storage cabinets, gas cabinets, or exhausted enclosures. Where Note d 
also applies, the increase for both notes shall be applied accumulatively. 
f.
Quantities shall not be limited in a building equipped throughout with an 
approved automatic sprinkler system. 
g.
Allowed only in buildings equipped throughout with an approved automatic 
sprinkler system. 
h.
Containing not more than the maximum allowable quantity per control area of Class 
IA, Class IB or Class IC flammable liquids. 
i.
Inside a building, the maximum capacity of a combustible liquid storage system 
that is connected to a fuel-oil piping system shall be 660 gallons provided such 
system conforms to this code. 
j.
Quantities in parenthesis indicate quantity units in parenthesis at the head of 
each column. 
k.
A maximum quantity of 200 pounds of solid or 20 gallons of liquid Class 3 
oxidizers is allowed when such materials are necessary for maintenance purposes, 
operation or sanitation of equipment when the storage containers and the manner 
of storage are approved. 
l.
Net weight of pyrotechnic composition of the fireworks. Where the net weight of 
the pyrotechnic composition of the fireworks is not known, 25 percent of the 
gross weight of the fireworks including packaging shall be used. 
m.
For gallons of liquids, divide the amount in pounds by 10 in accordance with